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Updated: May 3, 2026

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
Published on: December 21, 2015
Lithography-assisted alignment control for preparation of mesoporous silica films with uniaxially oriented
Yusuke Yamauchi1, Shinsuke Ishihara, Norihiro Suzuki
1World Premier International (WPI) Research Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan. Yamauchi.Yusuke@nims.go.jp.
Abstract:
We report the lithography-assisted alignment control of one-dimensional (1D) mesochannels. The effectiveness on both nonionic and cationic surfactants is discussed, and a continuous film with fully uniaxially oriented mesochannels is also successfully prepared.
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