A cheap and quickly adaptable in situ electrical contacting TEM sample holder design
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Updated: May 3, 2026

High Throughput Microfluidic Rapid and Low Cost Prototyping Packaging Methods
Published on: December 23, 2013
Felix Börrnert1, Ralf Voigtländer2, Bernd Rellinghaus2
1Speziallabor Triebenberg, Technische Universität Dresden, 01062 Dresden, Germany; IFW Dresden, PF 27 01 16, 01171 Dresden, Germany.
Abstract:
In situ electrical characterization of nanostructures inside a transmission electron microscope provides crucial insight into the mechanisms of functioning micro- and nano-electronic devices. For such in situ investigations specialized sample holders are necessary. A simple and affordable but flexible design is important, especially, when sample geometries change, a holder should be adaptable with minimum effort. Atomic resolution imaging is standard nowadays, so a sample holder must ensure this capability. A sample holder design for on-chip samples is presented that fulfils these requisites. On-chip sample devices have the advantage that they can be manufactured via standard fabrication routes.
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