Tomographic diffractive microscopy and multiview profilometry with flexible aberration correction.

Area of Science:

• Optics and Photonics
• Microscopy
• Surface Metrology

Background:

• Conventional holographic microscopy has limitations in lateral resolution and phase unwrapping for surface analysis.
• Classical holographic interferometric measurements can suffer from coherent noise and complex data processing.

Purpose of the Study:

• To introduce a novel tomographic diffractive microscope operating in reflection mode.
• To enhance lateral resolution and precision in 3D surface shape measurements of reflective samples.
• To overcome limitations of conventional holographic microscopy and interferometric techniques.

Main Methods:

• Development of a tomographic diffractive microscope in reflection configuration.
• Reconstruction of the phase of the diffracted field from recorded data.
• Application of the technique to image various test samples.

Main Results:

• Achieved improved lateral resolution compared to conventional holographic microscopes.
• Demonstrated high-precision 3D surface shape measurements by phase reconstruction.
• Observed reduction in coherent noise and simplified phase unwrapping.

Conclusions:

• The developed tomographic diffractive microscope offers superior performance for reflective surface analysis.
• The technique provides advantages in lateral resolution, phase unwrapping, and noise reduction.
• This method enables precise metrology of reflective surfaces with combined high lateral and longitudinal precision.