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    Aberrations significantly degrade imaging quality in aplanatic SIL microscopes when sample thickness deviates from the design. A MEMS deformable mirror effectively compensates for these aberrations, restoring near-ideal imaging performance.

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    Area of Science:

    • Optical microscopy
    • Aberration optics

    Background:

    • Aplanatic solid immersion lens (SIL) microscopes offer high resolution.
    • Image quality is sensitive to sample thickness deviations from the microscope's design parameters.

    Purpose of the Study:

    • To model and experimentally validate the impact of sample thickness errors on aplanatic SIL microscope imaging.
    • To demonstrate a method for aberration compensation to restore imaging quality.

    Main Methods:

    • Modeling of aberrations caused by sample thickness errors.
    • Experimental measurements using a high numerical aperture (NA ~3.5) aplanatic SIL microscope.
    • Compensation of aberrations using a Micro-Electro-Mechanical Systems (MEMS) deformable mirror.

    Main Results:

    • Significant image quality degradation was observed with sample thickness variations.
    • The developed model accurately predicted the measured aberrations.
    • The MEMS deformable mirror successfully compensated for aberrations, recovering near-ideal imaging quality.

    Conclusions:

    • Sample thickness is a critical parameter for high-quality imaging in aplanatic SIL microscopes.
    • Aberration compensation using MEMS deformable mirrors is a viable technique to overcome thickness-induced image degradation.