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Fabrication of Silica Ultra High Quality Factor Microresonators
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Compact suspended silicon microring resonators with ultrahigh quality
Optics Express
|February 12, 2014
Summary
We developed tiny silicon microring resonators with excellent optical quality, achieving a quality factor of 9.2 × 10^5. These high-performance resonators show promise for advanced applications in sensing and photonics.
Area of Science:
- Photonics
- Materials Science
- Optical Engineering
Background:
- Microring resonators are crucial for integrated photonics.
- Achieving ultra-high optical quality factors is essential for advanced photonic applications.
- Suspended silicon structures offer unique advantages for optical confinement.
Purpose of the Study:
- To propose and demonstrate compact suspended silicon microring resonators.
- To achieve ultra-high optical quality factors in these devices.
- To explore their potential for diverse photonic applications.
Main Methods:
- Fabrication of suspended silicon microring resonators.
- Characterization of optical quality factor (Q-factor).
- Analysis of optical confinement and device performance.
Main Results:
- Demonstrated compact suspended silicon microring resonators.
- Achieved an intrinsic quality factor of 9.2 × 10^5 for a 9 μm radius resonator.
- Observed high optical confinement due to the suspended structure.
Conclusions:
- The developed microring resonators possess ultra-high optical quality.
- The high Q-factor and optical confinement enable broad applications.
- Potential applications include biosensing, quantum photonics, nonlinear photonics, cavity optomechanics, and optical signal processing.
