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Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation--an alternate

Dass Sudhir1, M Bandyopadhyay1, W Kraus2

  • 1ITER-India, Institute for Plasma Research, A-29, GIDC, Sector-25, Gandhinagar, Gujarat 382 025, India.

The Review of Scientific Instruments
|February 13, 2014
PubMed

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