A new air-cooled argon/helium-compatible inductively coupled plasma torch

Area of Science:

• Analytical Chemistry
• Plasma Physics

Background:

• Inductively coupled plasma (ICP) torches are crucial for various analytical techniques.
• Conventional ICP torches often require high gas flows and have limitations with specific gases like helium.

Purpose of the Study:

• To design and develop a versatile ICP torch with an integrated air-cooling system.
• To evaluate the torch's performance with both argon and helium plasmas.
• To achieve stable plasma generation with reduced gas consumption and enhanced power capabilities.

Main Methods:

• A novel ICP torch design featuring three concentric quartz tubes was developed.
• An air-cooling system was integrated into the torch design.
• The same torch and impedance-matching network were used for both argon and helium plasma generation.
• Plasma stability and performance were assessed under varying radio frequency (RF) power and gas flow rates.

Main Results:

• Stable argon ICP (Ar-ICP) was achieved at 1 kW RF power, 11 L/min plasma gas, and 20 L/min cooling gas.
• Stable helium ICP (He-ICP) was sustained with 2 kW RF power (twice conventional), 15 L/min plasma gas, and 20 L/min cooling gas.
• The air-cooling system effectively stabilized plasma shape through gas pressure differentials.

Conclusions:

• The developed ICP torch offers a unified platform for both Ar-ICP and He-ICP.
• This design facilitates lower plasma gas consumption for both gases.
• The torch enables high-power operation for He-ICP, expanding its application potential.