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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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New soft X-ray beamline BL07LSU at SPring-8

Susumu Yamamoto1, Yasunori Senba2, Takashi Tanaka3

  • 1Synchrotron Radiation Laboratory, Laser and Synchrotron Research Center, The Institute for Solid State Physics, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa 277-8581, Japan.

Journal of Synchrotron Radiation
|February 25, 2014
PubMed

Keywords:
figure-8 undulatorhigh brilliancehigh energy resolutionmaterials scienceplane-grating monochromatorpolarization controlsegmented cross undulatorsoft X-ray beamline

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