Equipment to detect luminescence induced by cluster ion collision

The possibility to analyze on-line the surface region of solid materials using the cluster ion beam luminescence spectroscopy has been examined. At this aim, the cluster ion beam apparatus for the processing of solid materials was modified. The neutral clusters were ionized by the electron impact ionization to obtain an intense cluster ion beam. The tungsten filament used in this ionization method was replaced with an oxide one to reduce the emission of the background light by decreasing the operating temperature of the filament. To further suppress this light, antireflection materials were used to cover the parts inside the vacuum chamber, such as walls and inner surfaces of the einzel lens. The signal to noise ratio was improved more than one order of magnitude. The emission of photons induced by the irradiation of cluster ion beams was detected.