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Parameter extraction from fabricated silicon photonic devices
Applied Optics
|March 26, 2014
Summary
This study extracts effective refractive indices for silicon photonic devices like micro-ring resonators and directional couplers. These indices accurately predict device performance, aiding in fabrication quality control.
Area of Science:
- Photonics and optical engineering.
- Materials science and semiconductor device characterization.
Background:
- Silicon photonics enables integrated optical circuits.
- Accurate material property extraction is crucial for device performance prediction.
Purpose of the Study:
- To extract effective refractive indices for silicon photonic devices.
- To validate extracted indices by reconstructing experimental transmission spectra.
Main Methods:
- Combined analytical and numerical modeling.
- Fabrication and in-house measurement of micro-ring resonators, racetrack resonators, and directional couplers.
- Dispersion curve analysis to determine effective index as a function of wavelength.
Main Results:
- Extracted dispersion curves show linearity with wavelength in the S and C bands.
- Effective indices accurately reconstruct measured transmission spectra, showing close agreement with experiments.
- The method provides plausible results for silicon photonic devices.
Conclusions:
- The extracted effective indices are reliable for characterizing silicon photonic devices.
- This approach can inform and constrain fabrication parameters like waveguide dimensions and coupling gaps.
- The findings support the use of effective indices for predicting device performance in silicon photonics.

