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Updated: May 1, 2026

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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
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Fano resonances in a multimode waveguide coupled to a high-Q silicon nitride ring resonator
Optics Express
|March 26, 2014
Summary
Silicon nitride ring resonators enable low-loss integrated optics. Tuning fiber positions revealed tunable asymmetric Fano resonances, promising for sensing applications.
Area of Science:
- Integrated Optics
- Photonics
- Materials Science
Background:
- Silicon nitride (Si3N4) offers low-loss optical properties for integrated photonic circuits.
- Optical ring resonators are key components in manipulating light on-chip.
Purpose of the Study:
- To investigate light transmission through a silicon nitride ring resonator coupled to a multimode waveguide.
- To explore the excitation and probing of waveguide modes using single-mode fibers.
- To analyze the resulting Fano resonances and their tunability.
Main Methods:
- Coupling single-mode fibers to input and output ports of a Si3N4 waveguide.
- Selective excitation and probing of waveguide modes.
- Observation and analysis of transmission spectra.
- Development of a coupled mode theory model.
Main Results:
- Strong asymmetric Fano resonances were observed in the transmission spectra.
- The asymmetry of the Fano resonance was tunable by adjusting fiber positions.
- The Fano resonance arises from interference between waveguide modes and the ring resonator.
- A theoretical model based on coupled mode theory accurately described the experimental findings.
Conclusions:
- Silicon nitride ring resonators coupled to multimode waveguides exhibit tunable asymmetric Fano resonances.
- The observed Fano resonances are a result of mode interference.
- The tunability and the extended nature of optical modes make this system highly promising for optical sensing applications.
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