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Electron beam lithography on irregular surfaces using an evaporated resist.

Jian Zhang1, Celal Con, Bo Cui

  • 1Department of Electrical and Computer Engineering and Waterloo Institute for Nanotechnology (WIN), University of Waterloo , Waterloo, Ontario N2L 3G1, Canada.

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|March 28, 2014
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Summary

Thermal evaporation offers a simpler, more accessible method for applying electron beam resists like polystyrene, enabling high-resolution nanofabrication on irregular surfaces for advanced applications.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Surface Science

Background:

  • Spin-coating electron beam resists is challenging on nonplanar, irregular, or fragile substrates.
  • Existing methods for nanopatterning on irregular surfaces can be complex and require specialized equipment.

Purpose of the Study:

  • To demonstrate thermal evaporation as a viable method for coating polystyrene electron beam resist.
  • To achieve high-resolution nanofabrication on nonplanar and irregular surfaces.
  • To present a simpler and more accessible alternative to existing techniques.

Main Methods:

  • Polystyrene, a negative electron beam resist, was applied using thermal evaporation.
  • Nanostructures were fabricated on Atomic Force Microscope (AFM) cantilevers and optical fibers.
  • High-resolution patterning was performed using electron beam lithography.

Main Results:

  • Achieved a high resolution of 30 nm half-pitch using thermally evaporated polystyrene.
  • Successfully fabricated nanostructures on irregular substrates like AFM cantilevers and optical fibers.
  • The thermal evaporation process proved simpler and more accessible than existing methods, not requiring specialized SEM accessories.

Conclusions:

  • Thermal evaporation is a practical and accessible technique for applying electron beam resists on challenging substrates.
  • This method enables high-resolution nanofabrication on nonplanar surfaces, opening possibilities for advanced applications.
  • Potential applications include AFM tip-enhanced Raman spectroscopy and lab-on-fiber technology.