Strain sensor of carbon nanotubes in microscale: from model to metrology

A strain sensor composed of carbon nanotubes with Raman spectroscopy can achieve measurement of the three in-plane strain components in microscale. Based on previous work on the mathematic model of carbon nanotube strain sensors, this paper presents a detailed study on the optimization, diversification, and standardization of a CNT strain sensor from the viewpoint of metrology. A new miniaccessory for polarization control is designed, and two different preparing methods for CNT films as sensing media are introduced to provide diversified choices for applications. Then, the standard procedure of creating CNT strain sensors is proposed. Application experiments confirmed the effectiveness of the above improvement, which is helpful in developing this method for convenient metrology.