Simulation of probe position-dependent electron energy-loss fine structure

Mark P Oxley1, Myron D Kapetanakis1, Micah P Prange1

  • 11Department of Physics and Astronomy,Vanderbilt University,Nashville,Tennessee 37235,USA.

Summary

We developed a new method combining density functional theory and dynamical scattering theory to accurately calculate electron energy-loss near-edge structure in scanning transmission electron microscopy. This approach correctly accounts for electron beam effects, improving material analysis.

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