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Micro/Nano-scale Strain Distribution Measurement from Sampling Moiré Fringes
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Formation of three-way scanning electron microscope moiré on micro/nanostructures

Qinghua Wang1, Satoshi Kishimoto2, Hiroshi Tsuda1

  • 1Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan.

Thescientificworldjournal
|April 2, 2014
PubMed

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