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Ultra-thin 3D nano-devices from atomic layer deposition on polyimide

Nathan T Eigenfeld1, Jason M Gray, Joseph J Brown

  • 1Department of Mechanical Engineering, University of Colorado at Boulder, 1111 Engineering Drive, 427 UCB, Boulder, CO, 80309-0427, USA.

Advanced Materials (Deerfield Beach, Fla.)
|April 3, 2014
PubMed
Summary

No abstract available in PubMed .

Keywords:
NEMSatomic layer depositionmicrobolometernanofabricationpolymers

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