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Updated: May 1, 2026

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
Published on: January 27, 2017
John T Fourkas1, John S Petersen
1Department of Chemistry & Biochemistry, University of Maryland, College Park, MD 20742, USA. fourkas@umd.edu.
Two-color photolithography uses two light wavelengths to activate and deactivate photoresists, enabling nanoscale feature creation. This innovative technique offers high resolution with cost-effective light sources.
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