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Updated: May 1, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
S Chakram1, Y S Patil1, L Chang1
1Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, New York 14853, USA.
We achieved ultrahigh mechanical quality factors in silicon nitride (SiN) resonators, setting new records for mesoscopic flexural resonators. Optimizing substrate design is key to reducing energy loss and enabling quantum mechanics in macroscopic systems.
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