A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance

Area of Science:

• Materials Science
• Surface Analysis
• Analytical Chemistry

Background:

• Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) is a powerful surface analysis technique.
• Achieving high lateral and mass resolution simultaneously in ToF-SIMS presents a persistent challenge.
• Existing ToF-SIMS operation modes have limitations in achieving nanoscale resolution.

Purpose of the Study:

• To introduce and characterize a novel operation mode for ToF-SIMS on a TOF.SIMS 5 instrument.
• To evaluate the performance of this new mode regarding lateral resolution, mass resolution, and ion current.
• To demonstrate the capabilities of the novel mode through various application examples.

Main Methods:

• Implementation of a novel operation mode utilizing a Bi-ion gun on a TOF.SIMS 5 instrument.
• Adjustment of primary ion currents for optimized performance.
• Comparative analysis against established ToF-SIMS operation modes.
• Application of the novel mode to analyze oxygen isotopes and showcase high lateral/mass resolution.

Main Results:

• The novel operation mode achieves sub-100 nm lateral resolution.
• Adjustable primary ion currents allow for tailored measurements.
• Demonstrated high accuracy in oxygen isotope analysis.
• Successful combination of high lateral and high mass resolution capabilities.

Conclusions:

• The novel ToF-SIMS operation mode significantly enhances lateral resolution capabilities.
• This mode provides accurate isotopic analysis and combines high lateral with high mass resolution.
• The findings offer new possibilities for nanoscale surface analysis and scientific investigation.