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Updated: Apr 30, 2026

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
TiO2 embedded Si nanowire network based Schottky detector for enlarged light detection
Researchers developed a silicon (Si) nanowire (NW) network coated with titanium dioxide (TiO2) for enhanced photodetection. This novel TiO2-Si NW device shows significantly improved light sensitivity compared to traditional thin films.
Area of Science:
- Materials Science
- Nanotechnology
- Optoelectronics
Background:
- Silicon nanowires (Si NWs) offer unique electronic and optical properties.
- Titanium dioxide (TiO2) is a promising material for optoelectronic applications.
- Improving the performance of photodetectors is crucial for various sensing technologies.
Purpose of the Study:
- To fabricate a silicon nanowire network using glancing angle synthesized silver nanoparticles (Ag NPs) assisted etching.
- To deposit a TiO2 thin film (TF) on the Si NWs and characterize its optical and electrical properties.
- To evaluate the photodetection performance of the TiO2-Si NW device and compare it with a TiO2 TF device.
Main Methods:
- Fabrication of Si NW network via Ag NPs assisted etching.
- Characterization using field emission gun-scanning electron microscopy (FEG-SEM).
- Optical absorption measurements and photoconduction studies under illumination.
Main Results:
- Formation of Si NWs with diameters of 110-180 nm.
- TiO2 deposition enhanced optical absorption by 2.5 times compared to bare Si.
- TiO2-Si NW detector exhibited higher photoconduction and threefold enhanced photodetection versus TiO2 TF.
- Dark currents were 0.1 mA/cm² (TiO2 TF) and 0.2 mA/cm² (TiO2-Si NW), increasing to 0.2 mA/cm² and 1.23 mA/cm² under illumination, respectively.
Conclusions:
- The TiO2-Si NW structure demonstrates superior photodetection capabilities.
- Ag-TiO2 contacts exhibit Schottky behavior, contributing to device performance.
- Carrier diffusion effects influence the photocurrent response in the Si NW device.
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