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MEMS based Low Cost Piezoresistive Microcantilever Force Sensor and Sensor Module.

H J Pandya1, Hyun Tae Kim1, Rajarshi Roy1

  • 1Department of Mechanical Engineering, Maryland Robotics Center, Institute for Systems Research, University of Maryland, College Park, MD 20742, USA.

Materials Science in Semiconductor Processing
|May 24, 2014
PubMed
Summary

We developed a low-cost microelectromechanical systems (MEMS) piezoresistive micro-force sensor using silicon-on-insulator (SOI) substrates. This sensor demonstrates high sensitivity for precise force measurements.

Keywords:
Atomic Force MicroscopyForce SensorMEMSMicrocantileverPiezoresistorSensor Module

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Area of Science:

  • Materials Science
  • Microelectromechanical Systems (MEMS)
  • Nanotechnology

Background:

  • MEMS-based sensors offer miniaturization and high sensitivity.
  • Piezoresistive sensors are crucial for force measurement applications.
  • Silicon-on-insulator (SOI) substrates provide enhanced performance for MEMS devices.

Purpose of the Study:

  • To fabricate and characterize a low-cost MEMS-based piezoresistive micro-force sensor.
  • To investigate the effect of annealing temperature on the residual stress of sputtered silicon films.
  • To determine the spring constant and sensitivity of the fabricated microcantilever.

Main Methods:

  • Fabrication of SOI substrate using RF magnetron sputtering.
  • Material characterization using Atomic Force Microscopy (AFM) and X-ray Diffraction (XRD).
  • Force-displacement measurements using Atomic Force Microscopy (AFM) setup.

Main Results:

  • Optimized silicon film deposition and annealing process to control residual stress.
  • Fabricated microcantilevers with dimensions 130 µm x 40 µm x 1.0 µm.
  • Achieved a spring constant of 0.1488 N/m and sensitivity of 2.7 mV/N.

Conclusions:

  • Successfully fabricated a cost-effective MEMS piezoresistive micro-force sensor.
  • Demonstrated the sensor's capability for accurate force detection and measurement.
  • The developed sensor shows potential for various micro-force sensing applications.