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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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High-resolution wide-dynamic range electronically scanned white-light interferometry.

Lazo M Manojlović

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    Summary
    This summary is machine-generated.

    A new white-light interferometry technique achieves sub-nanometer resolution for precise measurements. This high-resolution, wide-dynamic range method uses simple optical components and advanced fringe analysis.

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    Area of Science:

    • Optics and Photonics
    • Metrology and Measurement Science

    Background:

    • Interferometry is crucial for high-precision measurements.
    • Existing techniques may face limitations in resolution or dynamic range.

    Purpose of the Study:

    • To present a novel electronically scanned white-light interferometry (ESWLI) technique.
    • To achieve sub-nanometer resolution and wide dynamic range using off-the-shelf components.

    Main Methods:

    • Utilizes electronically scanned white-light interferometry.
    • Employs a simple optical setup with mutually inclined wedge and camera axes.
    • Incorporates two-dimensional fringe pattern analysis.

    Main Results:

    • Achieved a resolution below 0.3 nm.
    • Demonstrated a wide dynamic range of 106 dB.
    • Maintained performance with a signal-to-noise ratio below 25 dB.

    Conclusions:

    • The presented ESWLI technique offers exceptional resolution and dynamic range.
    • The use of off-the-shelf components makes the technique accessible and cost-effective.
    • This method advances high-precision optical metrology applications.