Novel field emission SEM column with beam deceleration technology

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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

Published on: July 17, 2015

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Jaroslav Jiruše1, Miloslav Havelka1, Filip Lopour1

  • 1TESCAN, Libušina třída 1, 62300 Brno, Czech Republic.

Ultramicroscopy
|June 16, 2014
PubMed

Keywords:
Beam decelerationCathode lens modeLow energy electronsSEM

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