You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Apr 26, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A new X-ray computed laminography scanning scheme significantly reduces radiation dose and scanning time for nondestructive testing. This method enhances image contrast and spatial resolution, crucial for sensitive devices.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: