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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Theory of dynamical electron channeling contrast images of near-surface crystal defects

Y N Picard1, M Liu1, J Lammatao1

  • 1Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA 15213-3890, USA.

Ultramicroscopy
|August 16, 2014
PubMed

Keywords:
Defect imagingElectron channeling contrast imagingImage simulationSEM

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