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Scanning-probe Single-electron Capacitance Spectroscopy
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Scanning-probe Single-electron Capacitance Spectroscopy

Published on: July 30, 2013

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Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric

Fei Wang1, Nicolas Clément, Damien Ducatteau

  • 1Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN), CNRS UMR 8520, University of Lille, Avenue Poincaré, CS 60069, F-59652 Villeneuve d'Ascq, France.

Nanotechnology
|September 13, 2014
PubMed

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