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Published on: April 12, 2018
Air stable p-doping of WSe2 by covalent functionalization
Peida Zhao1, Daisuke Kiriya, Angelica Azcatl
1Electrical Engineering and Computer Sciences, University of California , Berkeley, California 94720, United States.
Air-stable chemical doping of transition metal dichalcogenides (TMDCs) is achieved via covalent functionalization. This study demonstrates p-doping of WSe2 using NOx chemisorption, significantly reducing contact resistance.
Area of Science:
- Materials Science
- Solid State Physics
- Surface Chemistry
Background:
- Transition metal dichalcogenides (TMDCs) are promising 2D materials with tunable electronic properties.
- Achieving stable chemical doping in TMDCs, particularly for air-stable p-doping, remains a significant challenge.
- Contact resistance is a critical bottleneck for TMDC-based electronic devices.
Purpose of the Study:
- To investigate covalent functionalization as a method for air-stable chemical doping of TMDCs.
- To explore the p-doping of tungsten diselenide (WSe2) using nitrogen oxide (NOx) chemisorption.
- To demonstrate the impact of doping on the electrical properties and contact resistance of WSe2.
Main Methods:
- Chemisorption of NOx on WSe2 at 150 °C.
- Synchrotron-based soft X-ray absorption spectroscopy (XAS) and X-ray photoelectron spectroscopy (XPS) for chemical state analysis.
- Ab initio simulations to identify favorable dopant species and configurations.
- Electrical measurements to quantify hole concentration and contact resistance.
Main Results:
- Formation of WSe(2-x-y)O(x)N(y) species on WSe2 surfaces and interfaces via NOx chemisorption.
- Identification of WSe2:NO at selenium vacancy sites as the predominant dopant species through spectroscopy and simulations.
- Achieved a maximum hole concentration of ~10^19 cm^-3, independent of WSe2 thickness.
- Demonstrated a 5-order-of-magnitude reduction in contact resistance between Pd and WSe2.
Conclusions:
- Covalent functionalization offers a viable route for air-stable chemical doping of TMDCs.
- NOx chemisorption effectively p-dopes WSe2, leading to degenerate semiconductor characteristics.
- The developed doping strategy significantly improves contact properties, paving the way for advanced TMDC electronics.
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