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Measurement of Fluid Pressure

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Geometry optimization for micro-pressure sensor considering dynamic interference.

Zhongliang Yu¹, Yulong Zhao¹, Lili Li¹

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China.

The Review of Scientific Instruments

|October 3, 2014

Summary

This summary is machine-generated.

This study optimized piezoresistive micro-pressure sensor geometry using a novel performance factor (PF). The quad-island design achieved the highest PF, making it ideal for altimetry applications.

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Area of Science:

Microelectromechanical Systems (MEMS)
Sensor Technology
Materials Science

Background:

Piezoresistive absolute micro-pressure sensors are crucial for various applications.
Optimizing sensor geometry is key to enhancing performance metrics like sensitivity and reducing interference.
Existing designs may not fully address the trade-offs between different performance aspects.

Purpose of the Study:

To optimize the geometry of piezoresistive absolute micro-pressure sensors.
To introduce a comprehensive performance factor (PF) for evaluating sensor designs.
To identify a superior geometry for enhanced sensor performance, particularly for altimetry.

Main Methods:

Development of a performance factor (PF) integrating sensitivity, resonant frequency, and acceleration interference.
Finite element analysis (FEA) to simulate stress distributions in proposed geometries.
Multivariate fitting and MATLAB optimization to determine optimal dimensions.
Fabrication of sensor prototypes using silicon bulk micromachining.

Main Results:

Three novel geometries were proposed, incorporating islands and sensitive beams.
The geometry with quad islands demonstrated the highest performance factor (PF) of 210.947 Hz(1/4).
Experimental validation confirmed the effectiveness of the PF and the superiority of the quad-island design.

Conclusions:

The defined performance factor (PF) is a rational metric for comprehensive sensor evaluation.
The quad-island geometry offers superior overall performance for piezoresistive absolute micro-pressure sensors.
This optimized sensor design is well-suited for altimetry applications due to its favorable characteristics.