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Updated: Jun 16, 2026

Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique
04:22

Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique

Published on: May 17, 2024

Overcoming high-temperature performance limitations: Multidimensional design and innovation of thin-film

Zhongkai Zhang1, Tianci Zhang1, Zhaojun Liu1

  • 1State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Iscience
|June 15, 2026
PubMed

Keywords:
Classification Descriptionapplied sciencesmechanical engineeringthermodynamics

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