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Updated: Apr 22, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
This study characterizes ferroelectric-liquid-crystal-on-silicon (FLCOS) spatial light modulators for hologram production in interferometric metrology. FLCOS devices achieve precise wavefront correction, minimizing errors for accurate measurements.
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