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Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass.

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    Applied Optics
    |October 17, 2014
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    Hydrodynamic effect polishing (HEP) achieves atomic-level surface roughness on quartz glass. This noncontact method effectively removes subsurface defects, revealing and eliminating microplastic scratches for a damage-free, ultra-smooth finish.

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    Area of Science:

    • Materials Science
    • Surface Engineering
    • Nanotechnology

    Background:

    • Hydrodynamic effect polishing (HEP) is a noncontact machining process capable of achieving atomic-level surface roughness.
    • Investigating subsurface integrity is crucial for understanding the performance of polished materials.

    Purpose of the Study:

    • To investigate the subsurface structure of quartz glass processed by Hydrodynamic effect polishing (HEP).
    • To evaluate the effectiveness of HEP in removing surface and subsurface defects.

    Main Methods:

    • Quartz glass surfaces were processed using Hydrodynamic effect polishing (HEP).
    • The polished surfaces were subsequently etched using a hydrofluoric acid solution to reveal subsurface structures.
    • Microscopic analysis was performed to observe defect removal and assess surface roughness.

    Main Results:

    • HEP processing resulted in atomic-level flatness and a damage-free surface and subsurface.
    • Microplastic scratches, initially hidden by a redeposition layer, were exposed and subsequently removed.
    • Surface roughness decreased significantly as the removal depth increased, reaching an atomic level after complete subsurface damage removal.
    • Defects oriented parallel to the wheel's rotational axis were removed before those oriented vertically.

    Conclusions:

    • Hydrodynamic effect polishing (HEP) is a highly effective method for achieving ultra-smooth, damage-free surfaces on quartz glass.
    • The process systematically removes subsurface defects, leading to significant improvements in surface quality.
    • HEP demonstrates precise control over defect removal based on their orientation relative to the polishing wheel.