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Atomic Force Microscopy
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Updated: Apr 21, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1Institute for Materials Research, Tohoku University, Katahira, Sendai 980-8577, Japan.
Atomic resolution holography, like X-ray fluorescence holography (XFH), provides 3D atomic images for local structure analysis. This technique reveals distortions and superlattices in materials like relaxor ferroelectrics.
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