Continuous fabrication of scalable 2-dimensional (2D) micro- and nanostructures by sequential 1D mechanical patterning processes
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Atomically Traceable Nanostructure Fabrication
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Jong G Ok1, Ashwin Panday, Taehwa Lee
1Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul, 139-743, Korea. jgok@seoultech.ac.kr.
Nanoscale
|November 4, 2014
Abstract:
We present a versatile and simple methodology for continuous and scalable 2D micro/nano-structure fabrication via sequential 1D patterning strokes enabled by dynamic nano-inscribing (DNI) and vibrational indentation patterning (VIP) as well as a 'single-stroke' 2D patterning using a DNI tool in VIP.
