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Updated: Apr 21, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Dynamic calibration of higher eigenmode parameters of a cantilever in atomic force microscopy by using tip-surface
Stanislav S Borysov1, Daniel Forchheimer2, David B Haviland2
1Nanostructure Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, SE-106 91 Stockholm, Sweden ; Nordita, KTH Royal Institute of Technology and Stockholm University, Roslagstullsbacken 23, SE-106 91 Stockholm, Sweden ; Theoretical Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA.
Abstract:
We present a theoretical framework for the dynamic calibration of the higher eigenmode parameters (stiffness and optical lever inverse responsivity) of a cantilever. The method is based on the tip-surface force reconstruction technique and does not require any prior knowledge of the eigenmode shape or the particular form of the tip-surface interaction. The calibration method proposed requires a single-point force measurement by using a multimodal drive and its accuracy is independent of the unknown physical amplitude of a higher eigenmode.

