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Updated: Apr 20, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
This study introduces an Autostereoscopy-based Three-Dimensional On-machine Measuring (ATDOM) system for precise 3D measurement of large, heavy micro-structured workpieces. The ATDOM system offers a compact, fast, and accurate solution for on-machine surface inspection.
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