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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Autostereoscopy-based three-dimensional on-machine measuring system for micro-structured surfaces.

Da Li, Chi Fai Cheung, Mingjun Ren

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    |November 18, 2014
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    Summary
    This summary is machine-generated.

    This study introduces an Autostereoscopy-based Three-Dimensional On-machine Measuring (ATDOM) system for precise 3D measurement of large, heavy micro-structured workpieces. The ATDOM system offers a compact, fast, and accurate solution for on-machine surface inspection.

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    Area of Science:

    • Metrology
    • Optical Measurement
    • Precision Engineering

    Background:

    • Traditional off-line measurement systems struggle with large, heavy micro-structured workpieces like precision roller drums.
    • Accurate 3D measurement of complex micro-structured surfaces is challenging, especially during the manufacturing process.

    Purpose of the Study:

    • To propose and develop an innovative 3D on-machine measuring system for micro-structured surfaces.
    • To address the limitations of traditional measurement methods for large-volume, heavy micro-structured components.

    Main Methods:

    • Development of an Autostereoscopy-based Three-Dimensional On-machine Measuring (ATDOM) system.
    • Utilizing autostereoscopy for non-contact, 3D surface data acquisition.
    • Experimental verification on a precision machine tool.

    Main Results:

    • The ATDOM system is compact, enabling fast data acquisition.
    • Achieved high accuracy in 3D computational reconstruction of complex micro-structured surfaces.
    • Demonstrated reliable performance under various measuring conditions.

    Conclusions:

    • The ATDOM system provides an efficient and reliable method for on-machine measurement of micro-structured surfaces.
    • This technology is crucial for quality control in precision manufacturing of complex components.