Simultaneously measuring thickness, density, velocity and attenuation of thin layers using V(z,t) data from time-resolved acoustic microscopy

To meet the need of efficient, comprehensive and automatic characterization of the properties of thin layers, a nondestructive method using ultrasonic testing to simultaneously measure thickness, density, sound velocity and attenuation through V(z,t) data, recorded by time-resolved acoustic microscopy is proposed. The theoretical reflection spectrum of the thin layer at normal incidence is established as a function of three dimensionless parameters. The measured reflection spectrum R(θ,ω) is obtained from V(z,t) data and the measured thickness is derived from the signals when the lens is focused on the front and back surface of the thin layer, which are picked up from the V(z,t) data. The density, sound velocity and attenuation are then determined by the measured thickness and inverse algorithm utilizing least squares method to fit the theoretical and measured reflection spectrum at normal incidence. It has the capability of simultaneously measuring thickness, density, sound velocity and attenuation of thin layer in a single V(z,t) acquisition. An example is given for a thin plate immersed in water and the results are satisfactory. The method greatly simplifies the measurement apparatus and procedures, which improves the efficiency and automation for simultaneous measurement of basic mechanical and geometrical properties of thin layers.