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Related Experiment Video

Updated: Apr 19, 2026

An Experimental Protocol for Assessing the Performance of New Ultrasound Probes Based on CMUT Technology in Application to Brain Imaging
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Rayleigh-Bloch waves in CMUT arrays.

Abdullah Atalar, Hayrettin Köymen, H Kağan Oğuz

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    |December 5, 2014
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    Summary

    A new method predicts capacitive micromachined ultrasonic transducer (CMUT) array performance by modeling spurious resonances caused by surface waves. These resonances can be mitigated by adjusting CMUT cell design, balancing performance with bandwidth.

    Area of Science:

    • Acoustics
    • Materials Science
    • Electrical Engineering

    Background:

    • Capacitive micromachined ultrasonic transducers (CMUTs) are crucial for various sensing applications.
    • Predicting the frequency response of large CMUT arrays is complex due to cell interactions and surface wave phenomena.
    • Spurious resonances can significantly degrade CMUT array performance.

    Purpose of the Study:

    • To develop a computationally efficient method for predicting the frequency response of large CMUT elements and arrays.
    • To identify the cause of spurious resonances in CMUT arrays.
    • To provide insights into mitigating unwanted resonances for improved CMUT performance.

    Main Methods:

    • Utilized the small-signal electrical equivalent circuit of a CMUT cell.

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  • Incorporated self and mutual radiation impedances of CMUT cells.
  • Derived the dispersion relation for Rayleigh-Bloch waves on the CMUT surface-liquid interface.
  • Analyzed wave reflections at array edges to model Fabry-Pérot resonance conditions.

    • Main Results:

    • Identified dispersive Rayleigh-Bloch waves as the source of spurious resonances.
    • Demonstrated that these waves form standing waves, leading to unwanted resonances.
    • Showed that low-order resonances persist even with significant cell loss.
    • Found that larger, thicker CMUT plates reduce resonances but also decrease bandwidth.

    Conclusions:

    • The developed method accurately predicts CMUT array frequency response, including spurious resonances.
    • Rayleigh-Bloch waves are a key factor limiting CMUT array performance.
    • CMUT cell design (plate size and thickness) can be optimized to manage resonances at the cost of bandwidth.