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Updated: Apr 19, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
High channel count and high precision channel spacing multi-wavelength laser array for future PICs.
Yuechun Shi1, Simin Li2, Xiangfei Chen1
1National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Microwave-Photonics Technology Laboratory, Nanjing University, Nanjing, 210093, China.
This study presents high channel count multi-wavelength semiconductor laser arrays (MLAs) with precise wavelength control using photolithography and the REC technique. This overcomes key adoption barriers for wavelength division multiplexing (WDM) networks.
Area of Science:
- Optoelectronics
- Photonics
- Semiconductor Devices
Background:
- Multi-wavelength semiconductor laser arrays (MLAs) are crucial for wavelength division multiplexing (WDM) networks.
- Wavelength precision and fabrication cost hinder widespread MLA adoption.
Purpose of the Study:
- To develop high channel count MLAs with precise wavelength control.
- To reduce fabrication costs using standard lithography techniques.
- To improve wavelength stability and single longitudinal mode (SLM) yield.
Main Methods:
- Utilized low-cost standard micrometer-level photolithography/holographic lithography.
- Employed the reconstruction-equivalent-chirp (REC) technique for precise wavelength determination.
- Applied an equivalent phase shift technique to enhance SLM yield.
Main Results:
- Demonstrated 60-wavelength MLAs with uniform wavelength spacing.
- Achieved high wavelength precision with nearly 83% of lasers within ±0.20 nm deviation.
- Obtained nearly 100% single longitudinal mode (SLM) yield, significantly higher than standard DFB lasers.
Conclusions:
- The developed MLAs offer precise wavelength control and high SLM yield at reduced fabrication costs.
- This approach addresses critical limitations hindering MLA deployment in WDM networks.
- The technology shows significant potential for advancing optical communication systems.
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