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Confocal soft X-ray scanning transmission microscopy: setup, alignment procedure and limitations.

Andreas Späth1, Jörg Raabe2, Rainer H Fink1

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Confocal scanning transmission soft X-ray microspectroscopy (cSTXM) enhances axial resolution for thicker specimens. This new technique improves imaging depth and opens new applications for X-ray microscopy.

Keywords:
STXMconfocal microscopysoft X-ray microscopyzone plate

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Area of Science:

  • Soft X-ray Microscopy
  • Spectroscopy
  • Materials Science

Background:

  • Scanning transmission soft X-ray microspectroscopy (STXM) offers high-resolution imaging and chemical sensitivity.
  • STXM's large depth of focus limits axial resolution for thicker specimens.

Purpose of the Study:

  • To introduce and demonstrate the first confocal STXM (cSTXM) system.
  • To present an alignment procedure for cSTXM in transmission and fluorescence modes.
  • To evaluate the capabilities and limitations of cSTXM for thicker samples.

Main Methods:

  • Implementation of a second zone plate in the STXM detection pathway to create a confocal arrangement.
  • Development and application of an elaborate alignment procedure.
  • Acquisition of confocal soft X-ray micrographs of known specimens.

Main Results:

  • Successful proof-of-principle demonstration of cSTXM.
  • Acquisition of high-resolution confocal micrographs, showcasing improved axial resolution.
  • Identification of advantages and limitations of the cSTXM technique.

Conclusions:

  • Confocal STXM significantly improves axial resolution compared to conventional STXM.
  • The developed cSTXM system shows potential for advanced imaging of thicker X-ray transparent materials.
  • Further development can expand cSTXM applications in various scientific fields.