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Automated CBED processing: sample thickness estimation based on analysis of zone-axis CBED pattern.

M Klinger1, M Němec1, L Polívka1

  • 1Laboratory of nanostructures and nanomaterials, Institute of Physics of the ASCR, Na Slovance 2, 182 21 Prague 8, Czech Republic.

Ultramicroscopy
|December 30, 2014
PubMed
Summary
This summary is machine-generated.

An automated tool estimates transmission electron microscopy (TEM) sample thickness using convergent beam electron diffraction (CBED) patterns. This method accurately determines thickness by comparing experimental data with simulated patterns.

Keywords:
AutomatizationCBEDComputer visionTEMThickness estimationZone axis

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Area of Science:

  • Materials Science
  • Crystallography
  • Electron Microscopy

Background:

  • Accurate sample thickness is crucial for quantitative analysis in transmission electron microscopy (TEM).
  • Traditional methods for thickness estimation using convergent beam electron diffraction (CBED) can be time-consuming and subjective.

Purpose of the Study:

  • To develop and validate an automated tool for precise thickness estimation of TEM samples using CBED.
  • To demonstrate the tool's applicability across different materials and preparation techniques.

Main Methods:

  • Automated detection and localization of CBED disks.
  • Coordinate system unification between experimental and simulated patterns.
  • Matching experimental CBED patterns against a library of simulated patterns for thickness determination.

Main Results:

  • The automated tool achieved high accuracy in thickness estimation for silicon and titanium samples.
  • Mean thickness difference compared to two-beam condition analysis was below 8%.
  • The method showed robustness across various sample preparation techniques (FIB, electrochemical polishing, Ar ion polishing).

Conclusions:

  • The developed automated CBED analysis provides a reliable and efficient method for TEM sample thickness estimation.
  • The technique holds potential for broader applications in quantitative CBED analysis, including lattice deformation and defect quantification.