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Updated: Apr 18, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Bo Yang1, Xingjun Wang2, Bo Dai3
1School of Instrument Science & Engineering, Southeast University, Nanjing 210096, China. yangbo20022002@163.com.
This study presents a novel z-axis resonant micro-accelerometer utilizing electrostatic stiffness for improved performance. The device demonstrates a scale factor of 31.65 Hz/g, proving its practicality.
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