You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Apr 18, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A new modulation measuring profilometry method uses auto-synchronous phase shifting and vertical scanning for accurate 3D object shape determination. This technique avoids shadows and occlusions by employing a coaxial optical system for precise surface profiling.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: