Planarised optical fiber composite using flame hydrolysis deposition demonstrating an integrated FBG anemometer

Area of Science:

• Materials Science
• Optical Engineering
• Microfluidics

Background:

• Traditional fabrication methods for optical fiber composites face limitations in achieving planarized structures.
• Micro-Opto-Electro-Mechanical Systems (MOEMS) require robust and integrated sensor components.
• Flame Hydrolysis Deposition (FHD) is a versatile technique for silica-based material synthesis.

Purpose of the Study:

• To report the first fabrication of a planarized optical fiber composite using FHD.
• To demonstrate the utility of this composite by creating a MOEMS hot wire anemometer.
• To evaluate the thermal and fluidic performance of the fabricated device.

Main Methods:

• Utilized Flame Hydrolysis Deposition (FHD) to create an optical quality doped silica layer.
• Employed micro-fabrication techniques to integrate the planarized optical fiber composite.
• Developed a MOEMS hot wire anemometer by securing the composite to a silicon wafer.
• Consolidated the silica layer at high temperature for structural integrity.

Main Results:

• Successfully fabricated a planarized optical fiber composite for the first time.
• Demonstrated the formation of a functional MOEMS hot wire anemometer.
• The device exhibited high thermal stability, withstanding temperatures over 580K.
• Achieved sufficient sensitivity to resolve convection interactions at low fluid velocities.

Conclusions:

• The novel planarized optical fiber composite fabricated via FHD offers a promising platform for advanced MOEMS.
• The developed MOEMS hot wire anemometer showcases the potential of this composite in fluid dynamics applications.
• This fabrication approach provides a robust and sensitive solution for micro-scale sensing.