Free-standing nanomembranes based on selective CVD deposition of functional poly-p-xylylenes

The precise engineering of ultrathin nanofilms with variable functionality remains an unmet challenge in nanotechnology. We report a strategy for generating free-standing nanomembranes based on the selective chemical vapor deposition polymerization of functional [2.2]paracyclophanes on micropatterned self-assembled monolayers of alkanethiolates on gold. This fabrication strategy can yield microstructured nanofilms that are between 2 and 5 nm thick. Subsequent release from the substrate results in free-standing nanoscale membranes with controlled pore size and geometry. The process allows for modification of important functional parameters, such as ultrasmall membrane thickness, membrane pore geometry, and chemical functionality.