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Compensation for the variable cyclic error in homodyne laser interferometers.

Pengcheng Hu1, Jinghao Zhu2, Xuanbiao Guo3

  • 1Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. hupc@hit.edu.cn.

Sensors (Basel, Switzerland)
|February 4, 2015
PubMed
Summary
This summary is machine-generated.

This study introduces a new real-time method to fix cyclic error in homodyne laser interferometers. The technique significantly reduces errors to under 0.6 nm, improving measurement accuracy.

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Area of Science:

  • Metrology
  • Optical Engineering
  • Instrumentation

Background:

  • Homodyne laser interferometers are susceptible to variable cyclic errors, impacting measurement precision.
  • Conventional methods like elliptical fitting struggle with time-varying errors, leaving significant residual errors (e.g., 13.3 nm).

Purpose of the Study:

  • To develop and validate a real-time compensation method for variable cyclic error in homodyne laser interferometers.
  • To achieve high-precision error correction, significantly outperforming existing techniques.

Main Methods:

  • Estimation of quadrature signal parameters using simple peak value detectors.
  • Real-time correction of cyclic error via arithmetic calculations on quadrature signals.
  • Implementation on a Field Programmable Gate Array (FPGA) for efficient processing.

Main Results:

  • The proposed method successfully reduces fixed cyclic error to below 0.6 nm.
  • Time-varying cyclic error is reduced to under 0.6 nm, a substantial improvement over the 13.3 nm residual error from elliptical fitting.

Conclusions:

  • The developed real-time compensation method offers a highly effective solution for cyclic errors in homodyne laser interferometers.
  • This technique enables significantly enhanced measurement accuracy and reliability in optical metrology applications.