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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Aberration corrected Lorentz scanning transmission electron microscopy

S McVitie1, D McGrouther1, S McFadzean1

  • 1Scottish Universities Physics Alliance, School of Physics and Astronomy, University of Glasgow, Glasgow, Glasgow G12 8QQ, UK.

Ultramicroscopy
|February 14, 2015
PubMed

Keywords:
Aberration correctionDifferential phase contrastLorentz microscopyMagnetic thin films

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