You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Apr 17, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Xiaoyan Mu1, Aiting Gao, Dehui Wang
1Key Laboratory of Applied Surface and Colloid Chemistry, Ministry of Education, College of Chemistry and Chemical Engineering, Shaanxi Normal University , Xi'an 710062, China.
This study challenges the idea that ordered molecular packing improves etching resistance. It introduces a new method where ordered self-assembled monolayers (SAMs) etch faster, enabling flexible microfabrication.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: