Coaxial lithography

Tuncay Ozel1, Gilles R Bourret2, Chad A Mirkin3

  • 11] Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA [2] International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA.

Nature Nanotechnology
|March 24, 2015
PubMed

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