MMI resonators based on metal mirrors and MMI mirrors: an experimental comparison

We report, to the best of our knowledge, the first experimental proof of MMI-based resonators. The resonators have been designed and fabricated on a micron-scale silicon photonics platform and are based on different reflectors suitably placed on two of the four ports of 2x2 MMIs with uneven splitting ratios, namely 85:15 and 72:28. The reflectors are either based on aluminum mirrors or on all-dielectric MMI mirrors. Performances of the different designs are compared with each other and with numerical simulations. Finesse values as high as 13.1 (9.9) have been measured in best aluminum (all-dielectric) resonators, corresponding to a quality factor of 5.8·10(3) (12.5·10(3)) and mirror reflectivity exceeding 92% (88%).