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Updated: Jan 18, 2026

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Fabrication and Testing of Photonic Thermometers
Published on: October 24, 2018
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Photonic contact thermometry based on 3 µm thick silicon cascaded ring resonators
Ben Wälchli1, Mikko Harjanne1, Shahin Tabandeh1
1VTT Technical Research Centre of Finland Ltd , Espoo, Finland.
Summary
We developed a new photonic temperature sensor using cascaded ring resonators on a silicon-on-insulator platform. This advanced sensor offers high sensitivity and a wide operational range for precise contact thermometry.
Area of Science:
- Photonics
- Optical Sensing
- Materials Science
Background:
- Accurate temperature measurement is crucial across scientific and industrial applications.
- Existing temperature sensors face limitations in sensitivity, operational range, or material compatibility.
- Photonic sensors offer potential advantages due to their inherent properties like high resolution and immunity to electromagnetic interference.
Purpose of the Study:
- To demonstrate a novel photonic temperature sensor.
- To leverage cascaded ring resonators (CRRs) on a silicon-on-insulator (SOI) platform for enhanced temperature sensing.
- To evaluate the sensor's performance, including sensitivity, operational range, and stability.
Main Methods:
- Fabrication of a photonic sensor chip using a 3 µm thick silicon-on-insulator (SOI) platform.
- Integration of three cascaded ring resonators (CRRs) for expanded free spectral range (FSR).
- Characterization of the sensor's temperature response using edge-coupled fiber packaging over a specific temperature range.
Main Results:
- The CRR-based sensor achieved an expanded FSR of 23 nm, enabling a wider operational temperature range.
- The sensor demonstrated a high temperature sensitivity of 85 pm K⁻¹ with a low uncertainty of 16.1 mK.
- The thick SOI platform provided low propagation loss (<0.1 dB cm⁻¹), negligible polarization dependence, and high-power handling (>10 mW).
Conclusions:
- The developed photonic temperature sensor offers a promising solution for precise contact thermometry.
- The use of cascaded ring resonators and a thick SOI platform significantly enhances sensor performance.
- This technology contributes to advancements in temperature measurement, aligning with the redefined kelvin scale.

